| International Organizing Committee | International Advisory Committee |
| Executive Committee | Publication Committee |
| Program Committee |
International Organizing Committee
| Name | Affiliation | Country | |
|---|---|---|---|
| Chair | T. Ohiwa | Toshiba Corp. | Japan |
| Member | |||
| H. Y. Chang | KAIST | Korea | |
| S. Fujimura | Tokyo Institute of Technology | Japan | |
| N. Fujiwara | Renesas Technology Corp. | Japan | |
| D. B. Graves | University of California at Berkeley | USA | |
| J.G. Han | Sungkyunkwan University | Korea | |
| M. Hori | Nagoya University | Japan | |
| M. Horioka | Applied Materials Inc. | USA | |
| M. Izawa | Hitachi Ltd. | Japan | |
| O. Joubert | LTM/CNRS | France | |
| Mark J. Kushner | Iowa State University | USA | |
| K. Nojiri | Lam Research Co., Ltd. | Japan | |
| K. Ono | Kyoto University | Japan | |
| L. Overzet | University of Texas at Dallas | USA | |
| M. C. M. van de Sanden | Eindvoven University of Technology | the Netherland | |
| N. Yamamoto | Tokyo Electron AT Ltd., | Japan |
International Advisory Committee
| Name | Affiliation | Country | |
|---|---|---|---|
| Chair | J. Nishizawa | Tokyo Metropolitan University | Japan |
| Co-chair | R. Gottscho | Lam Research Co., Ltd. | USA |
| Member | Y. Horiike | National Institute for Material Science | Japan |
| Thorsten Lill | Applied Materials Inc. | USA | |
| T. Makabe | Keio University | Japan | |
| H. Sugai | Chubu University | Japan | |
| S. Tachi | Hitachi Hi-Technologies Co. | Japan | |
| K. Tachibana | Kyoto University | Japan | |
| O. Takai | Nagoya University | Japan | |
| K. Tsujimoto | Selete | Japan | |
| M. Yoneda | Renesas Technology Corporation | Japan | |
| S. Zaima | Nagoya University | Japan |
Executive Committee
| Name | Affiliation | Country | |
|---|---|---|---|
| Chair | M. Shiratani | Kyushu University | Japan |
| Vice-chair | K. Kurihara | Toshiba Corporation | Japan |
| Vice-chair | S. Miyazaki | Hiroshima University | Japan |
| Member | J. P. Chang | UCLA | USA |
| N. E. Lee | Sungkyunkwan University | Korea | |
| T. Ishijima | Nagoya University | Japan | |
| N. Itabashi | Hitachi Ltd. | Japan | |
| K. Kinoshita | NEC Corporation | Japan | |
| S. Samukawa | Tohoku University | Japan | |
| K. Sasaki | Nagoya University | Japan | |
| M. Sekine | Nagoya University | Japan | |
| E. Stamate | Riso National Laboratory | Denmark | |
| T. Tatsumi | Sony corporation | Japan | |
| H. Toyoda | Nagoya University | Japan | |
| R. Wise | IBM | USA |
Publication Committee
| Name | Affiliation | Country | |
|---|---|---|---|
| Chair | K. Sasaki | Nagoya University | Japan |
| Vice-chair | K. Eriguchi | Kyoto University | Japan |
| Vice-chair | M. Shiratani | Kyushu University | Japan |
| Member | T. Abe | Tohoku University | Japan |
| P. Chabert | Ecole Polytechinique | France | |
| S. Hotta | Kyoto Institute of Technology | Japan | |
| T. Ishijima | Nagoya University | Japan | |
| K. Kinoshita | NEC Corp | Japan | |
| L. Overzet | University of Texas at Dallas | USA | |
| E. Stamate | Riso National Laboratory | Denmark | |
| T. Tatsumi | Sony Corp. | Japan |
Program Committee
| Name | Affiliation | Country | |
|---|---|---|---|
| Chair | T. Tatsumi | SONY Corp. | Japan |
| Vice-chair | N. Itabashi | Hitachi Ltd. | Japan |
| Vice-chair | K. Kinoshita | NEC Corp. Japan | Japan |
| Member | T. Arai | Hitachi Ltd. | Japan |
| K. Azuma | SHIMADZU CORPORATION | Japan | |
| J-P. Booth | FUJITSU LIMITED | France | |
| J. P. Chang | UCLA | USA | |
| M. Engelhardt | Qimonda | Germany | |
| K. Eriguchi | Kyoto University | Japan | |
| P. Favia | University of Bari | Italy | |
| S. Hamaguchi | Osaka University | Japan | |
| H. Hayashi | Toshiba Corp. Semiconductor Company | Japan | |
| M. Hiramatsu | Meijyo University | Japan | |
| M. Honda | Tokyo Electron AT Ltd. | Japan | |
| Y. Ichikawa | Fuji Electric Device Technology Co., Ltd. | Japan | |
| T. Ichiki | The University of Tokyo | Japan | |
| K. Ishikawa | Fujitsu Ltd. | Japan | |
| S. K. Lee | Hynix | Korea | |
| W.M.M. Kessels | TU/e | France | |
| H. Kokura | FUJITSU LIMITED | Japan | |
| A. Kono | Nagoya University | Japan | |
| A. Koshiisi | Lam Research Corp. | USA | |
| H. Kuwano | Tohoku University | Japan | |
| S. Miyazaki | Hiroshima University | Japan | |
| K. Nakamura | Chubu University | Japan | |
| M. Nakamura | SEMATECH/ISMI | Japan | |
| N. Negishi | Hitachi Ltd. | Japan | |
| Y. Noda | DENSO Corp. | Japan | |
| Abarra E. Noel | Canon Anerva Corp. | Japan | |
| K. Nojiri | Lam Research Co., Ltd. | Japan | |
| Y. Ohshita | Toyota Technological Institute | Japan | |
| H. Ohtake | Tohoku University | Japan | |
| F. Roozeboom | NXP | The Netherlands | |
| I. Sawada | Tokyo Electron Ltd. | Japan | |
| Y. Setsuhara | Osaka University | Japan | |
| D. Shamiryan | IMEC | Belgium | |
| K. Shimogaki | The University of Tokyo | Japan | |
| T. Shirafuji | Nagoya University | Japan | |
| J. W. Shon | Jusung Engineering | Korea | |
| K. Takahashi | Kyoto Institute of Technology | Japan | |
| S. Watanabe | Hitachi High-Technologies Corp. | Japan | |
| R. Wise | IBM | USA | |
| T. Yagisawa | Keio University | Japan | |
| K. Yonekura | Renesas Technology Corp. | Japan |