Dry processes and related technologies from fundamentals to applications
- Plasma & Surface Reactions
- Conductor & Si Etching
- Dielectric Etching
- Plasma-induced Damage
- Plasma Diagnostics
- Modeling and Simulation
- Plasma Equipment
- Monitoring Systems
- CVD/PVD/ALD
- Plasma processes for 3D Devices, FPD, LED, LASER, Organic Devices, Bio-Application, Medicine, MEMS, Nanotechnologies, and Environmental Technology
- Processes using Atmospheric and Liquid Plasmas
- New Dry Process Concept
- Wet Process & Reactions
"Precise Control of Plasma-surface reactions
--Applications for advanced CMOS devices, Nano-technologies, Organic devices, etc. --"